Product classification
Resistance thermal evaporation coating machine
1、 Application fields
The equipment is a high vacuum multi-purpose resistance evaporation coater. Four pairs of electrodes can evaporate different materials individually or simultaneously. The equipment is vertical top open cover structure, four pairs of electrodes can be evaporated individually or together, the sample is Φ 300 (max), the sample table rotates freely, and the revolution speed is adjustable from 2 to 20rpm; the flowmeter controls the gas flow to meet the requirements of ion bombardment pressure.
2、 Performance parameters
1. Size of coating chamber: Φ 450 × 500mm bell jar
2. Effective size of coating: Φ 300 mm
3. Ion bombardment power: 0.6kw
4. Recovery time of vacuum pumping (min): < 30
5. Number of evaporation sources: 4 pairs, with electric baffle;
6. Evaporation source power: 2kW (optional current and voltage control);
7. Bias voltage, film thickness gauge, film gauge and sample heating are optional;
8. Process gas: MFC 1 channel;
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Contact us
KYVAC Technology Co., Ltd.
Contact number:010-61778196
Project communication:18611455296
Customer service:18611455375
Complaints Hotline:18611455295
Shop phone:010-82548098
Suzhou Kemei:18611455368
Contact email:kyvac@kyky.com.cn
Contact address:No.13, North ertiao, Zhongguancun, Haidian District, Beijing
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