Resistance thermal evaporation coating machine
1、 Application fields
The equipment is a high vacuum multi-purpose resistance evaporation coater. Four pairs of electrodes can evaporate different materials individually or simultaneously. The equipment is vertical top open cover structure, four pairs of electrodes can be evaporated individually or together, the sample is Φ 300 (max), the sample table rotates freely, and the revolution speed is adjustable from 2 to 20rpm; the flowmeter controls the gas flow to meet the requirements of ion bombardment pressure.
2、 Performance parameters
1. Size of coating chamber: Φ 450 × 500mm bell jar
2. Effective size of coating: Φ 300 mm
3. Ion bombardment power: 0.6kw
4. Recovery time of vacuum pumping (min): < 30
5. Number of evaporation sources: 4 pairs, with electric baffle;
6. Evaporation source power: 2kW (optional current and voltage control);
7. Bias voltage, film thickness gauge, film gauge and sample heating are optional;
8. Process gas: MFC 1 channel;
KYVAC Technology Co., Ltd.
Contact address：No.13, North ertiao, Zhongguancun, Haidian District, Beijing