Space environment simulation system
Vacuum coating system
Vacuum leak detection system
Gyro preparation process equipment
High-end scientific engineering supporting vacuum system
Multi-station vacuum coating and sealing testing equipment
The equipment can complete many key preparation processes, such as high temperature vacuum degassing, cathode activation, cathode transfer, MCP cleaning, indium sealing and so on. It is a complex system with multiple movement modes. It is mainly used in neutrino detection experiment, high energy physics detection and single photon detection.
Vertical medium and high temperature collector tube coating equipment
Zhongke Kemei provides the overall solution for medium and high temperature collector tube coating. The equipment provides high temperature collector tube vacuum coating for solar thermal industry, which can deposit selective absorption film on stainless steel tube to ensure its high absorptivity and extremely low emissivity.
Horizontal single medium and high temperature collector tube coating equipment
The equipment is a Φ 1200x6000 water-cooled vacuum chamber, equipped with mobile male self rotating tooling, with a loading capacity of 10-20 pieces, and the male self rotating tooling can operate automatically point to point; the equipment has the functions of bias cleaning and auxiliary deposition, and the process heating temperature is 300 ℃; the equipment is equipped with 5 cylindrical targets or internal flat targets; it can be plated with Au, Ag, Al, Mo, Cu, Ti and other bottom metals, and is composed of Al, Ti, Si, etc The system can meet the requirements of the development and small batch production of optical interference film, cermet film and other selective endothermic films.
Medium and high temperature collector tube coating production line
There are four sections of Φ 1500x6000 water-cooled vacuum chamber in the main body of Φ 70x4060 heat collecting tube coating production line, which are pretreatment chamber, process chamber 1, process chamber 2 and sample chamber in sequence; the production line is equipped with movable male self rotating tooling and tooling closed-loop conveying system, with a loading capacity of 20 tooling (Φ 70); the tooling closed-loop conveying system is composed of transverse moving car and linear conveying line, in which the tooling can be used The rack runs automatically. Pretreatment room and process room 1 are heated at 300 ℃. Process room 1 is equipped with two cylindrical targets or built-in plane targets, which are connected with DC power supply for deposition of bottom metal; process room 2 is equipped with two pairs of twin targets connected with intermediate frequency power supply; multilayer ceramic intrinsic absorption layer composed of Al, Ti, Si, etc. is deposited; except for loading and unloading parts, the system operates automatically with high degree of automation, meeting the needs of batch production of selective heat absorbing films such as optical interference film and cermet film.
ITO/metal electrode R&D pilot line
The equipment is a high vacuum ITO box type coating equipment, which is mainly used for deposition of azo, GZO series transparent conductive films, metal films, semiconductor films, etc., and can also be used for deposition of other functional films.
MPO special shading film coating equipment
The double stage magnetron coating machine is mainly used for antimony coating on the surface of photomultiplier tube. In the process of film preparation, the functions of baking and degassing, ion bombardment cleaning, film deposition and bias voltage assistance, film thickness process test and so on can be realized. The digital programming, program control and dynamic monitoring can be carried out. It can display, record, count, calculate, save and output all kinds of operation data in real time, so as to achieve accurate control of film thickness and deposition Uniformity requirements. The equipment is a high vacuum electron beam evaporation equipment, which bombards the coated material with high energy density electron beam to vaporize and deposit it on the surface of substrate; the equipment deposits nickel chromium alloy or other single metal and alloy on the surface of quartz or other materials; the equipment consists of a vertical front door water-cooled vacuum chamber, a vacuum system, a tooling system, an electron beam deposition system, an ion bombardment system It is composed of heating system, measurement and monitoring system, electric control system and auxiliary system (rack, process air circuit, compressed air circuit, cooling water circuit and accessories).
Multiplier Magnetron Coating Machine
The double stage magnetron coating machine is mainly used for antimony coating on the surface of photomultiplier tube. In the process of film preparation, the functions of baking and degassing, ion bombardment cleaning, film deposition and bias voltage assistance, film thickness process test and so on can be realized. The digital programming, program control and dynamic monitoring can be carried out. It can display, record, count, calculate, save and output all kinds of operation data in real time, so as to achieve accurate control of film thickness and deposition Uniformity requirements.
Linear Lloyd lens coating machine
Linear Laue lens plating machine is a high-end equipment developed for high-energy synchrotron radiation source (HepS), which is used to prepare hard X-ray nano focusing Laue lens film. The most important feature is that there are many layers (thousands or even more) and the accuracy of film position and thickness is high (the average error of total position is less than ± 5nm, and the thickness error of each layer is less than 0.1nm). In order to ensure the thickness accuracy of each film, the magnetron sputtering technology is used to prepare the film. Its advantages are that the film thickness can be accurately controlled, the repeatability is good, the film is closely combined with the substrate, and the film has high purity and good compactness.
KYVAC Technology Co., Ltd.
Contact address：No.13, North ertiao, Zhongguancun, Haidian District, Beijing