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Vacuum coating system
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General Magnetron Sputtering Coating Machine

Magnetron sputtering coater is the most widely used PVD deposition equipment, which can be used for various single-layer, multi-layer and doped films. It can be coated with hard films, metal films, alloys, compounds, semiconductors, ceramics, dielectric composite films and other chemical reaction films, and can also be coated with ferromagnetic materials. The equipment is mainly used for the preparation of optical, electrical, photoelectric and other functional films in the laboratory, as well as the preparation of catalyst films for the growth of nano materials. The equipment is widely used in Colleges and universities and related scientific research institutions.
Product name

Multi-target vertical magnetron sputtering coating machine

The equipment can deposit single metal, alloy, various dielectric films and multilayer films; it is mainly used for R & D and small batch production of various functional films (wear-resistant, anti-corrosion, conductive film, insulating film, etc.) deposited on the surface of Φ 150 - Φ 500 hub type metal and non-metal parts.
Product name

Double-chamber multifunctional magnetron sputtering coating machine

The device is used for deposition of various monolayers, multilayers and doped films. It can be plated with hard film, metal film, alloy, compound, semiconductor, ceramic film, dielectric composite film and ferromagnetic material. As shown in the figure, the coater has two chambers, sharing a high vacuum system. In order to avoid cross contamination, one chamber can realize electron gun / resistance evaporation coating, and the other chamber can realize sputtering coating.
Product name

Double-chamber four-target magnetron sputtering coating machine

The equipment is used to deposit metal film, ceramic film, dielectric film, etc. by magnetron sputtering. Users can choose the working mode of single target independent working, four targets rotating working or four targets arbitrarily combined co sputtering according to the needs of the process. The equipment consists of two vacuum chambers, the main chamber and the preparation chamber. The main chamber is used to finish the main coating process. The preparation chamber is connected with the main chamber through a high vacuum gate valve, which can be used for plasma cleaning of the substrate before and after coating, and can replace the substrate without destroying the vacuum of the main chamber.
Product name

Resistance thermal evaporation coating machine

The equipment is a high vacuum multi-purpose resistance evaporation coater. Four pairs of electrodes can evaporate different materials individually or simultaneously. The equipment is vertical top open cover structure, four pairs of electrodes can be evaporated individually or together, the sample is Φ 300 (max), the sample table rotates freely, and the revolution speed is adjustable from 2 to 20rpm; the flowmeter controls the gas flow to meet the requirements of ion bombardment pressure.
Product name

Thermal evaporation and magnetron sputtering coating machine

The equipment has the functions of thermal evaporation and magnetron sputtering in the same vacuum chamber, and can be used for deposition of various single-layer films, multi-layer films and doped films; it can be used for plating various hard films, metal films, alloys, compounds, semiconductors, ceramic films, dielectric composite films, and ferromagnetic materials.
Product name

Multi-arc + magnetron sputtering composite coating machine

The device can deposit metal, alloy and various dielectric films, and can be used for reactive sputtering. It is also used for the research and development of hard films, decorative films and other functional films.
Product name

SBC-12 small ion sputtering instrument

This instrument is mainly used for coating conductive film (gold film) on the sample of scanning electron microscope. It is simple and convenient to operate. It is a necessary instrument for sample preparation of small and medium-sized scanning electron microscope.
Product name

SBC-2 type multifunctional sample surface treatment machine

Application fields: sample preparation, physical and chemical analysis, scientific research, etc. Main functions: ion spraying, ion sputtering, ion cleaning, carbon evaporation and other functions
Product name

Multi-station vacuum coating and sealing testing equipment

The equipment can complete many key preparation processes, such as high temperature vacuum degassing, cathode activation, cathode transfer, MCP cleaning, indium sealing and so on. It is a complex system with multiple movement modes. It is mainly used in neutrino detection experiment, high energy physics detection and single photon detection.
Product name

Vertical medium and high temperature collector tube coating equipment

Zhongke Kemei provides the overall solution for medium and high temperature collector tube coating. The equipment provides high temperature collector tube vacuum coating for solar thermal industry, which can deposit selective absorption film on stainless steel tube to ensure its high absorptivity and extremely low emissivity.
Product name

Horizontal single medium and high temperature collector tube coating equipment

The equipment is a Φ 1200x6000 water-cooled vacuum chamber, equipped with mobile male self rotating tooling, with a loading capacity of 10-20 pieces, and the male self rotating tooling can operate automatically point to point; the equipment has the functions of bias cleaning and auxiliary deposition, and the process heating temperature is 300 ℃; the equipment is equipped with 5 cylindrical targets or internal flat targets; it can be plated with Au, Ag, Al, Mo, Cu, Ti and other bottom metals, and is composed of Al, Ti, Si, etc The system can meet the requirements of the development and small batch production of optical interference film, cermet film and other selective endothermic films.
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Beijing Zhongke Kemei Technology Co., Ltd