Vacuum welding equipment
1. Limit vacuum degree of vacuum system: 5 × 10-8pa (with at least 4 sampling cylinders)
2. Vacuum system leakage rate: 5 × 10-10 pa.m3/s, Party B shall provide helium mass spectrometer leak detector for detection
3. The vacuum system should be completely oil-free. After reaching the limit vacuum, there should be no peak with mass number more than 44 in quadrupole mass spectrometry
4. The vacuum system (including quadrupole mass spectrometer) can withstand baking at 300 ℃ and the sampling cylinder can withstand baking at 400 ℃. The temperature control accuracy is ± 5 ℃
KYVAC Technology Co., Ltd.
Contact address：No.13, North ertiao, Zhongguancun, Haidian District, Beijing