Steaming antimony table multiplier magnetron coating machine
Multiplier magnetron coating machine is mainly used for antimony film plating on the multiplier surface of photomultiplier tubes. In the process of preparing membrane layer can realize double level basement of photomultiplier tube baking degassing, ion bombardment cleaning, film deposition and partial voltage auxiliary, film thickness, process testing, and other functions, can be digital programming, process control and dynamic monitoring, real time display, records, statistics, computing, storage, output various data operation, to achieve precise control of film thickness and uniformity of the deposit.
1) Single metallic antimony deposited by magnetically controlled target;
2), the body cavity size: 600 x420 Φ;
3) With bias cleaning and auxiliary deposition function;
4) Limit vacuum; 5.0X10-5Pa (from room temperature, nitrogen vacuum breaking state to the ultimate vacuum time ≤4 hours);
5) Working vacuum degree: the vacuum degree of the working cavity is better than 2.0×10-2Pa(the time of pumping to the working vacuum degree when the cavity is heated to 300℃ is less than 0.5 hours);
6) Baking temperature Max 300℃, temperature to 300℃ at normal temperature ≤20 minutes, temperature test accuracy ≤±2℃.
7), workpiece rack: smooth operation, speed adjustable 0.5-5rpm;
8) Capacity: about 700 pieces/day;
KYVAC Technology Co., Ltd.
Contact address：No.13, North ertiao, Zhongguancun, Haidian District, Beijing