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Ultra-high vacuum exhaust station
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Ultra-high vacuum exhaust station

It is used in the manufacture of photoelectronic glass products such as electronic glass materials for light detectors and photosensitive micro-fine glass.
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应用领域

　　应用于光探测器用电子玻璃材料、光敏微精玻璃等光电子玻璃产品的制造。

　　技术性能

　　1．工位接口数量：6-20工位；

　　2．极限真空度：抽排的工件极限真空度10-8Pa；

　　3．无油污染：采用无油机械泵与分子泵，避免油蒸汽对工作环境的污染；

　　4．烘烤：烘箱加热，烘烤温度可达到200℃且具有温度显示和可调功能；

　　5．工位处配置充N2接口，使在卸下工件时能够充入N2保护。

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