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Product classification
Resistive thermal evaporation coating machine
This device is a high vacuum multi-purpose resistance evaporation coating machine, with four pairs of electrodes that can evaporate different materials either individually or simultaneously. The device features a vertical top-opening structure, allowing for individual or co-evaporation of the four pairs of electrodes. The maximum sample size is Φ300, and the sample stage has a public rotation with an adjustable speed of 2-20 rpm. A flowmeter controls the gas flow to meet the ion bombardment pressure requirements.
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Product Details
1. Application Field
This device is a high vacuum multi-purpose resistance evaporation coating machine, with four pairs of electrodes that can evaporate different materials individually or simultaneously. The device has a vertical top-opening structure, and the four pairs of electrodes can evaporate separately or together. The sample size is Φ300(max), the sample stage rotates, and the rotation speed is adjustable from 2-20rpm; the flowmeter controls the gas flow to meet the ion bombardment pressure requirements.
2. Performance Parameters
1. Coating chamber size: Φ450×500mm dome
2. Effective coating size: Φ300mm
3. Ion bombardment power: 0.6kW
4. Vacuum recovery pumping time (min): <30
5. Number of evaporation sources: 4 pairs, with electric baffles;
6. Evaporation source power: 2kW (optional current and voltage control);
7. Bias, film thickness gauge, thin film gauge, and sample stage heating are optional;
8. Process gas: MFC 1 channel;
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