Product
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Product classification
Multi-target vertical magnetron sputtering coating machine
This device can deposit single metals, alloys, and various medium films, as well as multilayer films; it is mainly used for the research and small batch production of various functional films (wear-resistant, anti-corrosion, conductive films, insulating films, etc.) on the surfaces of metal and non-metal parts with hub sizes ranging from Φ150 to Φ500.
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Product Details
1. Application Field:
This equipment can deposit single metals, alloys, and various medium films, multi-layer films; mainly used for the research and small batch production of various functional films (wear-resistant, anti-corrosion, conductive films, insulating films, etc.) on the surface of Φ150-Φ500 hub-type metal and non-metal parts.
2. Performance Parameters
1. Φ1000x700 water-cooled vacuum chamber, side-opening door, sample rack with self-rotation;
2. Eight sputtering target positions arranged on the top and sides;
3. Six 6" DC targets, each equipped with one set of 3KW DC power supply;
4. Two 6" RF targets, each equipped with one set of 1.5KW RF power supply;
5. The system is equipped with a Kaufman ion source for workpiece cleaning;
6. The chamber can be heated, with a maximum heating temperature of 300℃.
7. Ultimate vacuum: 5x10-4Pa.
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Contact number：+86 010-61778196
Project communication：+86 18611455296
Customer service：+86 18611455375
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Shop phone：+86 010-82548098
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Contact email：kyvac@kyky.com.cn
Contact address: No. 13, North 2, Zhongguancun, Haidian District, Beijing
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