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Double-Stage Magnetron Sputtering Coater
The multipliers-level magnetron sputtering machine is mainly used for the deposition of antimony films on the multiplier-level surface of photomultiplier tubes. During the film preparation process, it can perform functions such as baking and degassing the substrate of the photomultiplier tube, ion bombardment cleaning, film deposition with bias voltage assistance, and film thickness process testing. It supports digital programming, program control, and dynamic monitoring, capable of real-time display, recording, statistical analysis, calculation, storage, and output of various operational data, achieving precise control over film thickness and deposition uniformity.
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Product Details
The multipliers magnetron sputtering coating machine is mainly used for the deposition of antimony films on the surface of photomultiplier tube multipliers. During the film preparation process, it can perform functions such as baking and degassing the photomultiplier tube multiplier substrate, ion bombardment cleaning, film deposition with bias voltage assistance, film thickness process testing, etc. It supports digital programming, program control, and dynamic monitoring, capable of real-time display, recording, statistics, calculation, storage, and output of various operating data, achieving precise control of film thickness and deposition uniformity.
Performance parameters:
1) Magnetron target deposition of single metal antimony;
2) Chamber inner dimensions: Φ600x420;
3) Equipped with bias cleaning and auxiliary deposition functions;
4) Ultimate vacuum; 5.0x10-5Pa (time to reach ultimate vacuum from room temperature and nitrogen break vacuum state ≤ 4 hours);
5) Working vacuum: working chamber vacuum better than 2.0×10-2Pa (time to reach working vacuum from chamber heated to 300℃ ≤ 0.5 hours);
6) Baking temperature max 300℃, time to heat from room temperature to 300℃ ≤ 20 minutes, temperature testing accuracy ≤ ±2℃.
7) Workpiece rack: stable operation, adjustable speed 0.5-5rpm;
8) Production capacity approximately 700 pieces/day;
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