Product
——
Product classification
Medium and high temperature heat collector tube coating production line
The Φ70x4060 heat pipe coating production line features a main body consisting of a Φ1500x6000 water-cooled vacuum chamber divided into four sections: pre-treatment chamber, process chamber 1, process chamber 2, and sample output chamber. The production line is equipped with a mobile public rotation tooling rack and a closed-loop conveyor system for the tooling rack, which has a loading capacity of 20 pieces (Φ70). The closed-loop conveyor system consists of a transverse vehicle and a linear conveyor line, allowing the tooling rack to operate automatically within the closed-loop system. The pre-treatment chamber and process chamber 1 are heated, with a heating temperature of 300°C. Process chamber 1 is equipped with two cylindrical targets or internal flat targets connected to a DC power supply for depositing the base metal layer, while process chamber 2 is equipped with two pairs of twin targets connected to an intermediate frequency power supply. This setup allows for the deposition of multilayer ceramic intrinsic absorption layers composed of materials such as Al, Ti, and Si. The system operates automatically, except for loading and unloading components, achieving a high level of automation to meet the batch production needs of selective heat-absorbing films such as optical interference films and metal ceramic films.
Classification:
Key words:
Product Details
1. Equipment Features:
Φ70x4060 heat pipe coating production line, the main body of the production line is a Φ1500x6000 water-cooled vacuum chamber with 4 sections, namely the pre-treatment chamber, process chamber 1, process chamber 2, and sample output chamber; the production line is equipped with a mobile public rotation tooling rack and a closed-loop conveying system for the tooling rack, with a loading capacity of 20 pieces (Φ70); the closed-loop conveying system consists of a transverse vehicle and a linear conveyor line, where the tooling rack operates automatically in the closed-loop system. The pre-treatment chamber and process chamber 1 are heated, with a heating temperature of 300℃. Process chamber 1 is equipped with 2 cylindrical targets or internal flat targets, connected to a DC power supply for depositing the base metal, while process chamber 2 is equipped with 2 pairs of twin targets connected to a medium frequency power supply; depositing multilayer ceramic intrinsic absorption layers composed of AL, Ti, Si, etc.; the system operates automatically except for loading and unloading components, with a high degree of automation, meeting the batch production needs of selective heat-absorbing films such as optical interference films and metal ceramic films.
2. Performance Parameters:
1. Production line dimensions: 36655(L)X17500(W)X7000(H)
2. Heat pipe dimensions: diameter range Φ70-120, length 4060;
3. Heat pipe performance: absorption rate ≥95% emission rate ≤9% (300℃);
4. Equipment capacity: 50,000 pieces/year (20 pieces loaded);
5. Ultimate vacuum: 8x10-4Pa, base vacuum: 3.2x10-3Pa;
6. Process heating temperature (pre-treatment chamber, process chamber 1): 300℃ armored heating component;
7. Magnetron target positions: process chamber 1: 2 pieces; process chamber 2: 2 pairs of twin targets;
8. Magnetron power supply: DC 2 sets, medium frequency 2 sets;
9. Vacuum system: molecular pump/primary pump unit + Roots roughing pump unit;
10. Process gases: 3 routes, MFC; reaction gases supplied in 6 segments, each independently controllable;
11. Number of accompanying tooling racks: 6 sets (20 pieces loaded);
12. Vacuum chamber isolation valve: Φ1500 pneumatic slide valve 4 sets;
13. Control system: PC+PLC control mode, automatic/manual/repair debugging function switching; multiple process parameters storage, various interlock safety protections;
14. System water, electricity, gas: total installed power: approximately 830KW
Cooling circulating water volume: 80-100M3/H
Compressed air consumption: 2M3/H
online message
* Note: Please be sure to fill in the information accurately and keep the communication unblocked. We will get in touch with you as soon as possible.(There is a discount for retaining funds today)
Friendship Link
Contact Us
Contact number：+86 010-61778196
Project communication：+86 18611455296
Customer service：+86 18611455375
Complaints Hotline：+86 18611455295
Shop phone：+86 010-82548098
Suzhou Kemei：+86 18611455368
Contact email：kyvac@kyky.com.cn
Contact address: No. 13, North 2, Zhongguancun, Haidian District, Beijing
Public Number
Website