Product
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Product classification
Horizontal single-body medium and high temperature heat collecting tube coating equipment
The device is a Φ1200x6000 water-cooled vacuum chamber, equipped with a mobile rotary tooling rack, which can hold 10-20 pieces. The rotary tooling rack operates automatically point-to-point. The device features bias cleaning and auxiliary deposition functions, with a process heating temperature of 300℃. It is equipped with 5 cylindrical targets or internal flat targets. It can deposit various base metals such as Au, Ag, Al, Mo, Cu, Ti, as well as multilayer ceramic films composed of Al, Ti, Si, etc. The system meets the requirements for the development and small batch production of various selective heat-absorbing films, including optical interference films and metal ceramic films.
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Product Details
1. Equipment Features:
This device is a Φ1200x6000 water-cooled vacuum chamber, equipped with a mobile self-rotating tooling frame, with a loading capacity of 10-20 pieces. The self-rotating tooling frame operates automatically point-to-point; the device includes bias cleaning and auxiliary deposition functions, with a process heating temperature of 300℃; it is equipped with 5 cylindrical targets or internal flat targets; it can deposit various base metals such as Au, Ag, AL, Mo, Cu, Ti, and multilayer ceramic films composed of AL, Ti, Si; the system meets the development and small batch production of various selective absorbing films such as optical interference films and metal ceramic films.
2. Performance Parameters:
1. Workpiece Length: Length specifications of 2 meters, 4 meters
2. Stainless Steel Metal Pipe Diameter Range: Φ70mm-120mm
3. Absorption Rate ≥95%
4. Emissivity ≤9% (300℃)
5. Coating Method: Magnetron Sputtering Deposition of Selective Absorbing Films
6. Equipment Capacity: 20,000 pieces/year (20 pieces per load)
7. Ultimate Vacuum: 8x10-4Pa, Background Vacuum: 3.2x10-3Pa;
8. Process Heating Temperature: 300℃ Armored heating component;
9. Magnetron Targets: 5;
10. Magnetron Power Supply: DC 1 set Intermediate frequency 2 sets;
11. Bias Power Supply: 1 set;
Control System:PC+PLC control mode, automatic/manual/repair debugging function switching; multiple process parameters storage, various interlock safety protections;
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