Product classification
Horizontal single medium and high temperature collector tube coating equipment
1、 Equipment features:
The equipment is a Φ 1200x6000 water-cooled vacuum chamber, equipped with mobile male self rotating tooling, with a loading capacity of 10-20 pieces, and the male self rotating tooling can operate automatically point to point; the equipment has the functions of bias cleaning and auxiliary deposition, and the process heating temperature is 300 ℃; the equipment is equipped with 5 cylindrical targets or internal flat targets; it can be plated with Au, Ag, Al, Mo, Cu, Ti and other bottom metals, and is composed of Al, Ti, Si, etc The system can meet the requirements of the development and small batch production of optical interference film, cermet film and other selective endothermic films.
2、 Performance parameters:
1. Workpiece length: 2m, 4m
2. Diameter range of stainless steel metal pipe: Φ 70mm-120mm
3. Absorptivity ≥ 95%
4. Emissivity ≤ 9% (300 ℃)
5. Coating method: magnetron sputtering deposition of selective absorption film
6. Equipment capacity: 20000 pieces / year (20 pieces)
7. Limit vacuum: 8x10-4pa, background vacuum: 3.2x10-3pa;
8. Process heating temperature: 300 ℃;
9. Magnetron target: 5;
10. Magnetic control power supply: 1 set of DC, 2 sets of intermediate frequency;
11. Bias power supply: 1 set;
Control system: PC + PLC control mode, automatic / manual / repair debugging function conversion; multiple process parameters storage, multiple interlocking safety protection;
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Contact us
KYVAC Technology Co., Ltd.
Contact number:010-61778196
Project communication:18611455296
Customer service:18611455375
Complaints Hotline:18611455295
Shop phone:010-82548098
Suzhou Kemei:18611455368
Contact email:kyvac@kyky.com.cn
Contact address:No.13, North ertiao, Zhongguancun, Haidian District, Beijing

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