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Product classification
Ultra-high vacuum degassing system
Ultra-high vacuum degassing equipment is mainly used for vacuum pumping and baking degassing during the preparation of electronic vacuum devices and semiconductor devices. It is an oil-free, ultra-high vacuum system. It can be customized with 1 to 8 stations according to user requirements and is applied in the electronic semiconductor industry.
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Product Details
Device Features
The ultra-high vacuum degassing equipment is mainly used for vacuum pumping and baking degassing during the preparation of electronic vacuum devices and semiconductor devices. It is an oil-free, ultra-high vacuum system. It can be customized for 1 to 8 stations according to user requirements and is applied in the electronic semiconductor industry.
Device Performance
1. The ultimate vacuum degree in the system: 5×10-8Pa;
2. The ultimate vacuum degree in the vacuum chamber: 5×10-5Pa;
3. Heating furnace size φ500×800mm;
4. Heating temperature 500~600℃.
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