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Helium Filling Vacuum System

The helium filling vacuum system is mainly used for vacuum pumping, degassing, and filling during the preparation of helium light pump magnetometer components. It is an eight-station, oil-free ultra-high vacuum system. It is applied in scientific research in the field of military magnetic sensors.

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Application Field

The helium charging vacuum system is mainly used for vacuum pumping, degassing, and charging during the preparation of helium light pump magnetometer components. It is an eight-station, oil-free ultra-high vacuum system. It is applied in scientific research in the field of military magnetic sensors.

Technical Performance

The equipment is a dual vacuum system;
At room temperature and no load: the station's ultimate vacuum level reaches 10^-9Pa level; the bell jar's ultimate vacuum level is 5×10^-2Pa;
System static vacuum level: better than 5×10^-5Pa within 5 minutes, maintained at 10^-5Pa level within 20 minutes;
Number of station interfaces: 8 stations, distributed in a circular pattern;
Using a vacuum bell jar to bake the workpiece, the maximum heating temperature of the bell jar is 500℃, working temperature is 200℃, temperature control accuracy is ±1℃; the heating rate of the bell jar is 0.2~6℃/min.

Ultra-high vacuum degassing system

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