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Gyro Vacuum Mixing Table
1. The ultimate vacuum degree of the vacuum system: 5×10^-8 Pa (at least 4 sampling gas bottles). 2. The leakage rate of the vacuum system: 5×10^-10 Pa.m³/S, with Party B providing a helium mass spectrometer for detection. 3. The vacuum system is required to be completely oil-free, and after reaching the ultimate vacuum, the quadrupole mass spectrometer scan should show no mass peaks greater than 44.
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1. The ultimate vacuum degree of the vacuum system: 5×10-8Pa (at least 4 sampling gas bottles)
2. The leakage rate of the vacuum system: 5×10-10Pa.m3/S, Party B provides a helium mass spectrometer leak detector for testing
3. The vacuum system requires to be completely oil-free, and after reaching the ultimate vacuum, the quadrupole mass spectrometer scan should have no mass peaks greater than 44.
4. The vacuum system (including the quadrupole mass spectrometer) can withstand baking at 300℃, and the sampling gas bottles can withstand baking at 400℃, with a temperature control accuracy of ±5℃.
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