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(Factory) Molecular Pump Unit

Classification:

Vacuum pump unit

Key words:

Vacuum application system

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Product Details

Model		FJ-620C	FJ-620F	FJ-700
Inlet Flange (In)		DN100 ISO-K	DN160 ISO-K	DN160 ISO-K
		DN160 CF	DN160 CF	DN160 CF
		DN160 ISO-K	DN160 ISO-K	DN160 ISO-K
Outlet Flange (Out)	ISO-KF	DN40	DN40	DN40
Pumping Speed	l/s	N₂：600	N₂：600	N₂：700
		He：380	He：380	He：580
		H₂：240	H₂：240	H₂：260
		Ar：580	Ar：580	Ar：680
Compression Ratio		N₂：10⁹	N₂：10⁹	N₂：10⁹
		He：10⁴	He：10⁵	He：10⁷
		H₂：10³	H₂：10⁴	H₂：10⁶
		Ar：10⁹	Ar：10⁹	Ar：10⁹
Ultimate Pressure	Pa	CF：6×10^-7 ISO-K：6×10^-6	CF：6×10^-8 ISO-K：6×10^-7	CF：6×10^-8 ISO-K：6×10^-7
Recommended Forevacuum Pressure	Pa	100	100	100
Forevacuum Pump Model		RV6 (default)	RV6 (default)	RV6 (default)
Cooling Type, Standard		Water Cooling	Air Cooling	Water Cooling, Air Cooling
Cooling Water Consumption	L/min	>1	>1	>1
Cooling Water Temperature	℃	≤25	≤25	≤25
Input Voltage/Frequency	V/Hz	380±20/50	380±20/50	380±20/50
Environment Temperature (℃)	Water Cooling Method	5℃-40℃
Environment Temperature (℃)	Air Cooling Method	5℃-32℃
Mounting Position		Vertical	Vertical	Vertical
Controller Model		FD-ⅡB/TCDP-Ⅱ	FD-ⅡB/TCDP-Ⅱ	FD-ⅡB/TCDP-Ⅱ
Length×Width×Height LWH （Height = Ground - Transition Chamber Ionization Gauge Position）	mm	550×690×956 (LF Port) 550×690×970 (CF Port)	550×690×956 (LF Port) 550×690×970 (CF Port)	550×690×850 (Water Cooling) 550x690x915 (Air Cooling)
Weight	kg	117	117	135

① Dry pump on request, specific model consult sales personnel.

(Research and Development Center) Molecular Pump Unit

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