Product classification

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(Research and Development Center) Molecular Pump Unit

Classification:


Product Details

Model

Unit

FJ-80

Flange (In)

 

DN63 ISO-K

DN63 CF

Flange (Out)

ISO-KF

DN16

Pumping Speed

l/s

N2: 62

He: 55

H2: 34

Ar: 65

Compression Ratio

 

N2: 109

He: 105

H2: 104

Ar: 109

Ultimate Pressure

Pa

3×10-5(ISO-K); 5×10-6(CF)

Recommended Fore-vacuum Pressure

Pa

<50

Forevacuum Pump

 

GHD-031B (Standard)

Cooling Type, Standard

 

Air

Cooling Water Consumption

L/min

>1

Cooling Water Temperature

≤25

Input Voltage / Frequency

V/Hz

220±20/50

Environment Temperature

5-40

Mounting Position

 

Vertical

Controller Model

 

 

L*W*H

mm

400×300×260

Weight

kg

16-21

Dry pump on request

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