Product classification
(Research and Development Center) Molecular Pump Unit
Classification:
Key words:
Product Details
|
Model |
Unit |
FJ-80 |
|
Flange (In) |
|
DN63 ISO-K |
|
DN63 CF |
||
|
Flange (Out) |
ISO-KF |
DN16 |
|
Pumping Speed |
l/s |
N2: 62 |
|
He: 55 |
||
|
H2: 34 |
||
|
Ar: 65 |
||
|
Compression Ratio |
|
N2: 109 |
|
He: 105 |
||
|
H2: 104 |
||
|
Ar: 109 |
||
|
Ultimate Pressure |
Pa |
3×10-5(ISO-K); 5×10-6(CF) |
|
Recommended Fore-vacuum Pressure |
Pa |
<50 |
|
Forevacuum Pump |
|
GHD-031B (Standard) |
|
Cooling Type, Standard |
|
Air |
|
Cooling Water Consumption |
L/min |
>1 |
|
Cooling Water Temperature |
℃ |
≤25 |
|
Input Voltage / Frequency |
V/Hz |
220±20/50 |
|
Environment Temperature |
℃ |
5-40 |
|
Mounting Position |
|
Vertical |
|
Controller Model |
|
|
|
L*W*H |
mm |
400×300×260 |
|
Weight |
kg |
16-21 |
Dry pump on request
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