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Vacuum Coating Machine: Introduction to Vacuum Coating Machines
Release time:
2021-10-08 11:26
For vacuumCoating machineIt can be simply understood as using electrons or high-energy lasers to bombard the target, breaking the surface into atomic clusters or ions, which are deposited on the substrate surface, and through the thin film formation process, a thin film is formed. The furnace body can be made of stainless steel, carbon steel, or a combination of both in a double-layer water-cooled structure.
According to process requirements, various types of coating equipment can be selected, including resistance evaporation vacuum coating equipment, electron beam evaporation vacuum coating equipment, magnetron sputtering vacuum coating equipment, ion plating vacuum coating equipment, magnetron reactive sputtering vacuum coating equipment, hollow cathode ion plating, and multi-arc ion plating. The working forms of the fixture include self-rotation, revolution, and a combination of both. Users can propose corresponding requirements based on the size and shape of the fragments, the range of rotation speed, and rotation accuracy, such as general adjustment and frequency adjustment.
Coating machineAuxiliary air intake system: The exhaust system is an important component of the coating machine's vacuum system, mainly consisting of a mechanical pump and a booster pump.(Mainly introducing the Roots pump) and an oil diffusion pump. This exhaust system consists of a "diffusion pump mechanical pump Roots pump low-temperature cold polycold". The exhaust process provides that the mechanical pump first evacuates the vacuum chamber to a low vacuum state of less than 2.0*10-2 PA, and then the diffusion pump evacuates to the prerequisite for vacuum. After that, when the diffusion pump evacuates the vacuum chamber, the mechanical pump is associated with the diffusion pump, completing the air intake action in this way.
Coating machineMechanical pump: The mechanical pump, also known as a multi-stage pump, is a widely used low vacuum pump. It maintains a sealing effect with oil and relies on mechanical methods to continuously change the volume of the suction port inside the pump, causing the volume of gas in the suction container to continuously expand, thereby achieving vacuum.
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