Product
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Product classification
Vacuum leak detection technology in the semiconductor device industry applications.
The helium and fluorinated oil pressurized leak detection device is a specialized automated leak detection system designed for detailed and coarse inspection of electronic components such as semiconductor devices, integrated circuits, and electronic products. It works in conjunction with a helium mass spectrometer leak detector and a heavy fluorinated oil heater, enabling the entire process of detailed and coarse inspection of electronic components.
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Product Details
Application Background
The helium and fluorine oil pressurization leak detection device is an automated leak detection system specifically designed for detailed and rough inspection of electronic components such as semiconductor devices, integrated circuits, and electronic products. It works in conjunction with a helium mass spectrometer leak detector and a heavy fluorine oil heating device, allowing for the entire process of detailed and rough inspection of electronic components.
Working Principle
1. Helium Pressurization Detailed Inspection of Components
First, place the component in a pressurizable sealed container. If there is a leak in the component, helium gas will be pressed into the internal cavity. After removing the component, it is placed in a vacuum container for helium leak testing.
2. Fluorine Oil Rough Inspection of Components
Place the component to be tested in a pressure vessel, inject low-boiling-point fluorine oil to submerge the workpiece, and apply pressure for a certain period. After pressurization, remove the tested item and immerse it in heated heavy fluorine oil to observe for bubbles. If bubbles are found, it can be determined as unqualified.
Main Technical Parameters:
1. The base vacuum degree of the pressure tank is better than 50Pa;
2. Vacuum measurement: thermocouple gauge;
3. Charging pressure: ≤1.0MPa;
4. Heating temperature: 125℃ ± 5℃;
5. Heating time: from room temperature to 125℃ ≤ 30 minutes;
6. Working voltage: 220VDC 50Hz
7. Instrument power: 1.5KW (heating power: 0.4KW);
8. Lighting lamp: 12VDC 10W;
9. Helium tank dimensions:
φ157×246, unit: mm;
10. Nitrogen tank dimensions:
φ157×246, unit: mm;
11. Filter oil tank particle size: ≤5μm;
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