Product classification
Thermal evaporation and magnetron sputtering coating machine
1、 Application fields
The equipment has the functions of thermal evaporation and magnetron sputtering in the same vacuum chamber, and can be used for deposition of various single-layer films, multi-layer films and doped films; it can be used for plating various hard films, metal films, alloys, compounds, semiconductors, ceramic films, dielectric composite films, and ferromagnetic materials.
2、 Performance parameters
1. Limit vacuum pressure: 8 × 10-5 PA;
2. Magnetic control target: 2 targets, diameter: Φ 50, power distribution (pneumatic) baffle;
3. Recovery time of vacuum pumping (min): < 30;
4. Vacuum chamber: Φ 500 × 550;
5. Evaporation electrode: 2 pairs of 2kW distribution (pneumatic) baffle;
6. Sample table: public rotation, public rotation: 2-20rpm adjustable;
7. Bias voltage, film thickness gauge, film gauge and sample heating are optional;
Links
Contact us
KYVAC Technology Co., Ltd.
Contact number:010-61778196
Project communication:18611455296
Customer service:18611455375
Complaints Hotline:18611455295
Shop phone:010-82548098
Suzhou Kemei:18611455368
Contact email:kyvac@kyky.com.cn
Contact address:No.13, North ertiao, Zhongguancun, Haidian District, Beijing

Official account

Website
COPYRIGHT © Beijing Zhongke Kemei Technology Co., Ltd 京ICP备2020044440号-1 Website map