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Multi-station vacuum coating and sealing inspection equipment

The equipment can complete multiple key preparation processes such as high-temperature vacuum degassing of photomultiplier tubes, cathode activation, cathode transfer, MCP cleaning, and indium sealing. It is a complex system with various modes of operation existing simultaneously. It is mainly used in the fields of neutrino detection experiments, high-energy physics detection, and single-photon detection.


Product Details

Application Field

The device can complete multiple key preparation processes such as high-temperature vacuum degassing of photomultiplier tubes, cathode activation, cathode transfer, MCP cleaning, and indium sealing, making it a complex system with various motion modes existing simultaneously. It is mainly used in neutrino detection experiments, high-energy physics detection, and single-photon detection fields.

Technical Performance:

1. Extreme vacuum: 5x10-6Pa, working vacuum: 5x10-5Pa;

2. Degassing heating temperature: 400℃, temperature uniformity: ±2.5℃;

3. Vertical movement speed of the cathode component: 0-500mm/min, repeat positioning accuracy: ±1.5mm;

4. Vertical movement speed of the MCP component: 0-500mm/min, repeat positioning accuracy: ±1.5mm;

5. Translation movement speed of the electron gun component: 0-500mm/min, repeat positioning accuracy: ±1.5mm;

6. Glass shell rotation speed: 0-3rpm, positioning accuracy: 0.02°;

7. Indium sealing lifting force: 0-100N.

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