Product classification
Linear Lloyd lens coating machine
Linear Laue lens plating machine is a high-end equipment developed for high-energy synchrotron radiation source (HepS), which is used to prepare hard X-ray nano focusing Laue lens film. The most important feature is that there are many layers (thousands or even more) and the accuracy of film position and thickness is high (the average error of total position is less than ± 5nm, and the thickness error of each layer is less than 0.1nm). In order to ensure the thickness accuracy of each film, the magnetron sputtering technology is used to prepare the film. Its advantages are that the film thickness can be accurately controlled, the repeatability is good, the film is closely combined with the substrate, and the film has high purity and good compactness.
Performance parameters:
Injection chamber
Background vacuum limit < 8 × 10-5pa
The chamber leakage rate was less than 1 × 10-7 pa.l/s
The maximum heating temperature of the substrate is ≥ 500 ℃
Sedimentation chamber
Limit vacuum degree: < 8 × 10-6pa
The chamber leakage rate was less than 1 × 10-8 pa.l/s
Number of target sites ≥ 9
The distance between the target and the sample is 60 ~ 100 mm, which can be adjusted manually
The number of switchable targets for a single power supply is more than or equal to 4
Maximum heating temperature of substrate ≥ 200 ℃
Speed stability of motion system ≤ 0.1% / 300 mm
Straightness of motion system ≤ 30 μ M / 300 mm
Testing room
Limit vacuum degree: < 8 × 10-6pa
The chamber leakage rate was less than 1 × 10-8 pa.l/s
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Contact us
KYVAC Technology Co., Ltd.
Contact number:010-61778196
Project communication:18611455296
Customer service:18611455375
Complaints Hotline:18611455295
Shop phone:010-82548098
Suzhou Kemei:18611455368
Contact email:kyvac@kyky.com.cn
Contact address:No.13, North ertiao, Zhongguancun, Haidian District, Beijing

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