A method for manufacturing a vacuum coating system device.

  Vacuum Coating SystemIt is a device for coating film devices under vacuum conditions. To improve production efficiency, vacuum coating systems usually have a conveyor for substrates to be coated or a carrier loaded with multiple substrates to be coated. Existing rollers are generally metal rollers, adopting a cylindrical integral metal structure. The substrate or carrier to be coated contacts the metal roller, driven by the roller for transmission. The current of the substrate or carrier to be coated is conducted through the metal roller to the chamber, achieving coating discharge. However, the substrate or carrier to be coated is tangent to the metal roller, resulting in hard contact between the two, causing vibration during the transmission process. As a result, the substrate or carrier to be coated gets scratched or even worn, and the contact area between the substrate or carrier to be coated and the metal roller is small, leading to slow conductivity and poor conductivity, affecting the stability of the coating discharge, resulting in poor coating effects, which cannot meet the process requirements of large capacity, high current, and high yield.
Therefore, it is necessary to provide aVacuum Coating Systemdevice to solve the problems of poor coating effect and stability of coating discharge. A vacuum coating system device includes a vacuum chamber, a conductive mechanism fixed in the vacuum chamber, and multiple roller mechanisms. The vacuum chamber has a conveying direction, and multiple roller mechanisms are arranged along the conveying direction. Each roller mechanism includes a driving unit and a roller, with the driving unit having an output shaft passing through the side wall of the vacuum chamber. The conductive mechanism includes a second driving unit, a conductive part, and multiple grounding strips. The conductive part is connected to the second driving unit, and the conductive part has a conductive surface that can contact the carrier.The vacuum coating systemhas one end of each grounding strip fixed to the second driving unit, and when in the coating state, it is electrically connected to the conductive part, while the other end is fixed to the vacuum chamber, and when in the coating state, it is electrically connected to the vacuum chamber, having a contracted state and an expanded state. In one embodiment, the conductive part includes multiple conductive blocks arranged along the conveying direction on one side of the conductive plate away from the corrugated pipe, with each conductive block engaging with the conductive plate. The end of each conductive block away from the conductive plate has a step, which includes a first surface, a second surface, and a third surface connecting the first and second surfaces. In one embodiment, a reinforcing plate is arranged between the conductive plate and the top rod, with the extending direction of the reinforcing plate parallel to the conveying direction, and the conductive plate and the top rod are fixedly connected.
InVacuum Coating Systemthe device, a driving unit operates, and an output shaft drives the lower roller to rotate, allowing the carrier on the roller to enter the vacuum chamber along the conveying direction. After the carrier is conveyed to a proper position in the vacuum chamber, the second driving unit operates to drive the conductive part and the grounding strip to move towards the carrier, and the grounding strip expands, allowing the conductive surface of the conductive part to contact the carrier, and the current is conducted through the conductive part from the carrier to the grounding strip, then introduced into the vacuum chamber.
In summary,Vacuum Coating Systema driving unit drives the roller to continue rotating, thereby allowing the carrier on the roller to output and complete evaporation; at least one buffer ring surrounding an output shaft is arranged on the roller, ensuring a soft contact between the carrier and the roller, reducing the hard contact area between the carrier and the roller, minimizing the vibration of the carrier during the transmission process, reducing scratches or even wear on the carrier, and ensuring coating effect and product yield. Since the conductive surface of the vacuum coating system's carrier contacts the carrier during coating discharge, the contact area between the carrier and the conductive part's surface is larger, the conductivity rate is faster, the conductivity is better, the stability of the coating discharge is improved, and the coating effect is better, meeting the process requirements of large capacity, high current, and high yield.