Ultra-high sensitivity gyro leak detection equipment
The ultra-high sensitivity leak detection equipment can make the leak detection chamber reach ultra-high background by pumping gas with molecular pump, and the suction pump can extract the hydrogen molecules remaining in the leak detection chamber, and the quadrupole mass spectrometry can detect all helium leaked from the workpiece, so as to improve the leak detection sensitivity of the gyroscope and the control accuracy of the gyroscope. The minimum detectable leakage rate of the system can reach 1 × 10-13pa · m3 / s. This equipment is suitable for ultra-high sensitivity leak detection of gyroscope, infrared detector dewar and other micro precision devices.
1. Ultra high vacuum: the limiting vacuum is 8 × 10-7 PA.
2. Minimum detectable leakage rate: 1 × 10-13pa.m3/s.
3. System leakage rate: 5 × 10-12pa m 3 / s.
4. Maximum baking temperature: 300 ℃.
5. The size of the leak detection chamber is φ 320 × H300, with metal wire seal.
6. Clean the oil-free vacuum system.
KYVAC Technology Co., Ltd.
Contact address：No.13, North ertiao, Zhongguancun, Haidian District, Beijing