Multi-station vacuum coating and sealing testing equipment
The equipment can complete many key preparation processes, such as high temperature vacuum degassing, cathode activation, cathode transfer, MCP cleaning, indium sealing and so on. It is a complex system with multiple movement modes. It is mainly used in neutrino detection experiment, high energy physics detection and single photon detection.
1. Limit vacuum: 5x10-6pa, working vacuum: 5x10-5pa;
2. Degassing heating temperature: 400 ℃, temperature uniformity: ± 2.5 ℃;
3. Vertical movement speed of cathode module: 0-500mm / min, repeated positioning accuracy: ± 1.5mm;
4. MCP module vertical movement speed: 0-500mm / min, repeat positioning accuracy: ± 1.5mm;
5. Translational velocity of electron gun assembly: 0-500mm / min, repeated positioning accuracy: ± 1.5mm;
6. The rotation speed of the glass shell is 0-3rpm, and the positioning accuracy is 0.02 °;
7. Indium capping lift is 0-100n.
KYVAC Technology Co., Ltd.
Contact address：No.13, North ertiao, Zhongguancun, Haidian District, Beijing