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Fluorinated Oil Leak Deteciton Device
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Fluorinated Oil Leak Deteciton Device

Application background    Helium fluorine oil pressurized leak detection device is a set of automatic leak detection device for the detailed and rough inspection of semiconductor devices, integrated circuits, electronic products and other electronic components. It can be used in conjunction with a helium mass spectrometer leak detector and a heavy fluorine oil heater to perform the entire fine inspection and rough inspection process of electronic components. working principle    1. Helium pressurization fine inspection of components    First put the components in a pressurized sealed container. If the components leak, helium will be pressed into the cavity. After the components are taken out, they are put into a vacuum container, and the helium quality is used for leak detection.   2. Fluorine oil coarse leak detection of components    Put the components under inspection into a pressure vessel, inject low-boiling fluorine oil, submerge the workpiece, and pressurize it for a certain period of time. After the pressurization is complete, take out the test piece, and then immerse it in the heated heavy fluorine oil to observe the bubbles. If bubbles are found, it can be judged as unqualified. The main technical parameters:   1. The background vacuum of the pressurized tank is better than 50Pa;   2, vacuum measurement: thermocouple meter;   3, inflation pressure: ≤1.0MPa;   4, heating temperature: 125℃ ± 5℃;   5. Heating time: from room temperature to 125℃ ≤30 minutes;   6, working voltage: 220VDC 50Hz   7, instrument power: 1.5KW (heating power: 0.4KW);    8. Lighting lamp: 12VDC 10W;    9. Helium tank size:   Φ157×246, unit: mm;   10. Nitrogen tank size:   Φ157×246, unit: mm;   11, filter oil tank filter particle size: ≤5μm;
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The helium fluorine oil pressurized leak detection device is a set of automatic leak detection device for the detailed inspection and rough inspection of semiconductor devices, integrated circuits, electronic products and other electronic components. It is used in conjunction with a helium mass spectrometer leak detector and a heavy fluorine oil heater to perform the entire fine inspection and rough inspection process of electronic components.

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Beijing Zhongke Kemei Technology Co., Ltd