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Medium and high temperature collector tube coating production line
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Medium and high temperature collector tube coating production line

There are four sections of Φ 1500x6000 water-cooled vacuum chamber in the main body of Φ 70x4060 heat collecting tube coating production line, which are pretreatment chamber, process chamber 1, process chamber 2 and sample chamber in sequence; the production line is equipped with movable male self rotating tooling and tooling closed-loop conveying system, with a loading capacity of 20 tooling (Φ 70); the tooling closed-loop conveying system is composed of transverse moving car and linear conveying line, in which the tooling can be used The rack runs automatically. Pretreatment room and process room 1 are heated at 300 ℃. Process room 1 is equipped with two cylindrical targets or built-in plane targets, which are connected with DC power supply for deposition of bottom metal; process room 2 is equipped with two pairs of twin targets connected with intermediate frequency power supply; multilayer ceramic intrinsic absorption layer composed of Al, Ti, Si, etc. is deposited; except for loading and unloading parts, the system operates automatically with high degree of automation, meeting the needs of batch production of selective heat absorbing films such as optical interference film and cermet film.
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1、 Equipment features:

There are four sections of Φ 1500x6000 water-cooled vacuum chamber in the main body of Φ 70x4060 heat collecting tube coating production line, which are pretreatment chamber, process chamber 1, process chamber 2 and sample chamber in sequence; the production line is equipped with movable male self rotating tooling and tooling closed-loop conveying system, with a loading capacity of 20 tooling (Φ 70); the tooling closed-loop conveying system is composed of transverse moving car and linear conveying line, in which the tooling can be used The rack runs automatically. Pretreatment room and process room 1 are heated at 300 ℃. Process room 1 is equipped with two cylindrical targets or built-in plane targets, which are connected with DC power supply for deposition of bottom metal; process room 2 is equipped with two pairs of twin targets connected with intermediate frequency power supply; multilayer ceramic intrinsic absorption layer composed of Al, Ti, Si, etc. is deposited; except for loading and unloading parts, the system operates automatically with high degree of automation, meeting the needs of batch production of selective heat absorbing films such as optical interference film and cermet film.

2、 Performance parameters:

1. Production line size: 36655 (L) x17500 (W) x7000 (H)

2. Collector tube size: diameter range: Φ 70-120, length: 4060;

3. Performance of collector tube: absorptivity ≥ 95%, emissivity ≤ 9% (300 ℃);

4. Equipment capacity: 50000 pieces / year (20 pieces per year);

5. Limit vacuum: 8x10-4pa, background vacuum: 3.2x10-3pa;

6. Process heating temperature (pretreatment room, process room 1): 300 ℃ armored heating module;

7. Magnetron target location: Technology Room 1: 2; technology room 2: 2 pairs of twin targets;

8. Magnetic control power supply: 2 sets of DC, 2 sets of intermediate frequency;

9. Vacuum system: molecular pump / front stage unit + roots roughing unit;

10. Process gas: 3-way, MFC; reaction gas: 6-stage, independent and controllable;

11. Quantity of accompanying tooling: 6 sets (20 pieces);

12. Vacuum chamber isolation valve: 4 sets of Φ 1500 pneumatic gate valve;

13. Control system: PC + PLC control mode, automatic / manual / repair debugging function conversion; multiple process parameters storage, multiple interlocking safety protection;

14. System water and electricity: total installed power: about 830kw

Cooling circulating water volume: 80-100m3 / h

Compressed air consumption: 2m3 / h

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Beijing Zhongke Kemei Technology Co., Ltd