The double stage magnetron coating machine is mainly used for antimony coating on the surface of photomultiplier tube. In the process of film preparation, the functions of baking and degassing, ion bombardment cleaning, film deposition and bias voltage assistance, film thickness process test and so on can be realized. The digital programming, program control and dynamic monitoring can be carried out. It can display, record, count, calculate, save and output all kinds of operation data in real time, so as to achieve accurate control of film thickness and deposition Uniformity requirements. The equipment is a high vacuum electron beam evaporation equipment, which bombards the coated material with high energy density electron beam to vaporize and deposit it on the surface of substrate; the equipment deposits nickel chromium alloy or other single metal and alloy on the surface of quartz or other materials; the equipment consists of a vertical front door water-cooled vacuum chamber, a vacuum system, a tooling system, an electron beam deposition system, an ion bombardment system It is composed of heating system, measurement and monitoring system, electric control system and auxiliary system (rack, process air circuit, compressed air circuit, cooling water circuit and accessories).