MPO special shading film coating equipment
The equipment is a high vacuum electron beam evaporation equipment, which bombards the coated material with high energy density electron beam to vaporize and deposit it on the surface of substrate; the equipment deposits nickel chromium alloy or other single metal and alloy on the surface of quartz or other materials; the equipment consists of a vertical front door water-cooled vacuum chamber, a vacuum system, a tooling system, an electron beam deposition system, an ion bombardment system It is composed of heating system, measurement and monitoring system, electric control system and auxiliary system (rack, process air circuit, compressed air circuit, cooling water circuit and accessories).
1) Deposition material: CrNi alloy (cr80ni20);
2) Film thickness meter: resolution 0.01 angstrom;
3) With glow discharge function: maximum voltage 3KV, power 600W, 320mA, working pressure 2.0x10-2mbar;
4) Uniformity of film: ± 5%;
5) Limit vacuum: 8.0 x10-5 PA;
6) Background vacuum: 5x10-4pa, arrival time: ≤ 30min;
7) Inner cavity size: Φ 800x1000;
8) Electron gun: Φ 50x25, 10kW, 270 ° deflection; with arc extinguishing and programmable scanning function;
9) Workpiece turret: the workpiece can realize common rotation, double-layer placement, deposition of different surfaces, micro pore deposition depth is determined by the workpiece placement angle; revolution speed: 1-10rpm;
10) Heating temperature: Max300 ℃, working temperature: 200 ℃, uniformity: ± 2 ℃;
11) Control system: PC + PLC, automatic, manual control mode conversion, a variety of interlocking protection, with a variety of parameter display functions and process menu storage capacity;
KYVAC Technology Co., Ltd.
Contact address：No.13, North ertiao, Zhongguancun, Haidian District, Beijing