MPO special shading film coating equipment
The equipment is a high vacuum electron beam evaporation equipment, that is, the use of high energy density electron beam bombardment of the plating material, vaporization and deposition on the surface of the substrate; The equipment is used to deposit nickel-chromium alloy or other single metal or alloy on the surface of quartz or other materials. The equipment is composed of vertical front door water-cooled vacuum chamber, vacuum system, tooling system, electron beam deposition system, ion bombardment system, heating system, measurement and monitoring system, electronic control system, auxiliary system (frame, process air channel, pressure air channel, cooling water channel, accessories), etc.
1) Deposition material: CrNi alloy (Cr80Ni20);
2) film thickness meter: resolution 0.01 angstrom;
3) With glow discharge function: maximum voltage 3kV, power 600W, 320mA, working pressure 2.0X10-2mbar;
4) film uniformity: ±5%;
5) Limit vacuum: 8.0X10-5Pa;
6) Background vacuum: 5x10-4Pa, arrival time: ≤30min;
7) equipment within the cavity size: 800 x1000 Φ;
8) gun: Φ x25 50, 10 kw, 270 ° deflection; Electron gun with arc extinguishing and programmable scanning function;
9) workpiece rotating frame: the workpiece can realize public rotation, double layer deposition on different surfaces, the depth of deposition in the microhole is determined by the workpiece placement Angle; Rotation speed: 1-10rpm;
10) Heating temperature: MAX300 ℃, working 200℃; Uniformity of plus or minus 2 ℃;
11) Control system: PC+PLC, automatic and manual control mode conversion, a variety of interlock protection, with a variety of parameters display function and process menu storage capacity;
KYVAC Technology Co., Ltd.
Contact address：No.13, North ertiao, Zhongguancun, Haidian District, Beijing