20-station gyro exhaust station
Characteristics of the equipment
This equipment is mainly used to provide vacuum exhaust, aeration and aging environment for the resonant cavity. It can vacuum and aerate the workpiece, and bake and degassing the device at the same time. Compact structure, can exhaust 20 workpieces at the same time. The integrated design of electronic control and workbench can save space greatly. The rotatable touch screen control board on the platform is greatly convenient for users to monitor the running state of the device.
The performance parameters
1 Limit pressure: room temperature ≤2×10-7Pa
2. System leakage rate: ≤6× 10-11pa.m3 /s
3. Leakage rate of work-piece connecting valve, charging fine adjustment valve and cylinder high valve: ≤2× 10-11pA.m3 /s
4 The highest baking temperature of pipes and valves: 300℃, and the baking temperature of pipelines is controllable.
KYVAC Technology Co., Ltd.
Contact address：No.13, North ertiao, Zhongguancun, Haidian District, Beijing