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Ultra-high vacuum exhaust station

It is used in the manufacture of photoelectronic glass products such as electronic glass materials for light detectors and photosensitive micro-fine glass.
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Application field

It is used in the manufacture of photoelectronic glass products such as electronic glass materials for light detectors and photosensitive micro-fine glass.

Technical performance

1. Number of station interfaces: 6-20 stations;

2. Limit vacuum degree: the limit vacuum degree of the workpiece of the pumping row is 10-8Pa;

3. No oil pollution: the use of oil-free mechanical pump and molecular pump, to avoid oil vapor pollution to the working environment;

4. Baking: Oven heating, baking temperature can reach 200℃ and has temperature display and adjustable function;

5. The station is equipped with N2 filling interface, so that the N2 protection can be filled when the workpiece is unloaded.

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Beijing Zhongke Kemei Technology Co., Ltd