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(R & D Center) Molecular pump unit

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Product details
Parameters

型号Model

单位 Unit

FJ-80

进气口法兰 Flange(In)

 

DN63 ISO-K

DN63 CF

排气口法兰 Flange(Out)

ISO-KF

DN16

抽速速率 Pumping Speed

l/s

N2:62

He:55

H2:34

Ar:65

压缩比 Compression Ratio

 

N2: 109

He: 105

H2:104

Ar:109

极限压强 ultimate Pressure

Pa

3×10-5(ISO-K);5×10-6(CF)

建议启动压强recommended fore-vacuum pressure

Pa

<50

前级泵型号forevacuum pump

 

GHD-031B①(标配 standard)

冷却方式 Cooling type,Standard

 

风冷 Air

冷却水流量 Cooling Water Consumption

L/min

>1

冷却水温度 Cooling Water Temperature

≤25

输入电压频率Input voltage / frequency

V/Hz

220±20/50

环境温度 environment temperature

5-40

安装方式 mounting position

 

垂直 Veritcal

适配电源型号Controller Model

 

 

长×宽×高 L*W*H

mm

400×300×260

重量 Weight

kg

16-21

  ①选配干泵,具体型号咨询销售人员dry pump on request

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Beijing Zhongke Kemei Technology Co., Ltd