Ultra high vacuum degassing equipment is mainly used for vacuumizing and baking degassing in X-ray tube preparation. It is an oil-free and ultra-high vacuum system. It has the characteristics of no oil vapor pollution, fast exhaust speed, high vacuum limit, and has the functions of automatic alarm and protection when water and power are cut off. According to the user's requirements, 1 ~ 8 stations can be customized, which can be used in the electronic semiconductor industry.